A Compact Immersion Grating Spectrometer with Quantum Capacitance Detectors for Space-Borne Far-IR Spectroscopy Project
&lt;p&gt;SPECTROMETER:&amp;nbsp; The grating spectrometer uses a curved grating fabricated on a high resistivity silicon wafer. Light will be coupled in via a silicon immersion lens and coupling waveguide. The wafer profile, including the grating facets are defined by photolithography and deep reactive etching (DRIE) …